Print Email Facebook Twitter Integrated optomechanical arrays of two high reflectivity SiN membranes Title Integrated optomechanical arrays of two high reflectivity SiN membranes Author Gartner, C.M. (TU Delft QN/Groeblacher Lab; University of Vienna; Kavli institute of nanoscience Delft) Moura, João P. (University of Vienna; Kavli institute of nanoscience Delft) Haaxman, Wouter (Student TU Delft; Kavli institute of nanoscience Delft) Norte, R.A. (TU Delft Dynamics of Micro and Nano Systems; Kavli institute of nanoscience Delft) Groeblacher, S. (TU Delft QN/Groeblacher Lab; Kavli institute of nanoscience Delft) Date 2018 Abstract Multielement cavity optomechanics constitutes a direction to observe novel effects with mechanical resonators. Several exciting ideas include superradiance, increased optomechanical coupling, and quantum effects between distinct mechanical modes among others. Realizing these experiments has so far been difficult, because of the need for extremely precise positioning of the elements relative to one another due to the high-reflectivity required for each element. Here we overcome this challenge and present the fabrication of monolithic arrays of two highly reflective mechanical resonators in a single chip. We characterize the optical spectra and losses of these 200 μm long Fabry-Pérot interferometers, measuring finesse values of up to 220. In addition, we observe an enhancement of the coupling rate between the cavity field and the mechanical center-of-mass mode compared to the single membrane case. Further enhancements in coupling with these devices are predicted, potentially reaching the single-photon strong coupling regime, giving these integrated structures an exciting prospect for future multimode quantum experiments. Subject mechanical arraysmechanical resonatorsoptical filtersOptomechanicsphotonic crystals To reference this document use: http://resolver.tudelft.nl/uuid:fff103bd-9ee7-4169-b77a-f774106ac8f4 DOI https://doi.org/10.1021/acs.nanolett.8b03240 ISSN 1530-6984 Source Nano Letters: a journal dedicated to nanoscience and nanotechnology, 18 (11), 7171-7175 Part of collection Institutional Repository Document type journal article Rights © 2018 C.M. Gartner, João P. Moura, Wouter Haaxman, R.A. Norte, S. Groeblacher Files PDF acs.nanolett.8b03240.pdf 3.31 MB Close viewer /islandora/object/uuid:fff103bd-9ee7-4169-b77a-f774106ac8f4/datastream/OBJ/view