Print Email Facebook Twitter Stress in tungsten carbide-diamond like carbon multilayer coatings Title Stress in tungsten carbide-diamond like carbon multilayer coatings Author Pujada, B.R. Tichelaar, F.D. Janssen, G.C.A.M. Faculty Applied Sciences Department Kavli Institute of Nanoscience Date 2007-01-10 Abstract Tungsten carbide-diamond like carbon (WC-DLC) multilayer coatings have been prepared by sputter deposition from a tungsten-carbide target and periodic switching on and off of the reactive acetylene gas flow. The stress in the resulting WC-DLC multilayers has been studied by substrate curvature. Periodicity and microstructure have been studied by transmission electron microscopy. It has been observed that compressive stress in the multilayers decreases when the bilayer thickness is reduced. Results show a minimum compressive stress for bilayer thickness of around 5?nm. This behavior is discussed in terms of interface stress and mixing between layers. Subject tungsten compoundsdiamond-like carbonmultilayersinternal stressescrystal microstructuretransmission electron microscopy To reference this document use: http://resolver.tudelft.nl/uuid:29a5cb91-dfeb-49a6-9fd2-7ab467d54717 DOI https://doi.org/10.1063/1.2430905 Publisher American Institute of Physics ISSN 0003-6951 Source http://link.aip.org/link/APPLAB/v90/i2/p021913/s1 Source Applied Physics Letters, 90 (2), 2007 Part of collection Institutional Repository Document type journal article Rights (c) 2007 The Author(s); American Institute of Physics Files PDF Tichelaar_2007.pdf 199.89 KB Close viewer /islandora/object/uuid:29a5cb91-dfeb-49a6-9fd2-7ab467d54717/datastream/OBJ/view