Print Email Facebook Twitter Multi-objective differential evolution optimization of ion beam analysis spectra Title Multi-objective differential evolution optimization of ion beam analysis spectra Author Mariën, Simon (TU Delft Electrical Engineering, Mathematics and Computer Science) Contributor Yorke-Smith, N. (mentor) Panichella, A. (graduation committee) Meersschaut, Johan (mentor) Degree granting institution Delft University of Technology Programme Computer Science Date 2024-03-22 Abstract n the rapidly evolving semiconductor industry, precise material characterization is crucial. This thesis focuses on enhancing Ion Beam Analysis (IBA), a pivotal tool in semiconductor characterization, through the integration of differential evolution optimization. This research proposes a single and multi spectra optimization algorithm approach controlled by a web application. Central to this work is a com- parative analysis of the proposed algorithms to simulated annealing and the DE algorithm proposed by Heller et al. [5]. This analysis shows a good performance of the proposed algorithms and a potential for industry application. The web application offers users a robust, user-friendly, and scalable interface for IBA optimization. By proposing and testing new IBA optimization methods, this thesis contributes significantly to semiconductor technology, offering new methods for material characterization at microscopic level.This project is a joint project between Imec (Leuven, Belgium) and HZDR (Dresden, Germany). Subject Differential evolutionMaterial characterizationIon Beam Analysis To reference this document use: http://resolver.tudelft.nl/uuid:2fcf9431-dd26-49bf-9d91-8b8052061e3a Part of collection Student theses Document type master thesis Rights © 2024 Simon Mariën Files PDF Msc_Thesis_Simon_Mari_n_Final.pdf 11.39 MB Close viewer /islandora/object/uuid:2fcf9431-dd26-49bf-9d91-8b8052061e3a/datastream/OBJ/view