Design of a Setup for Modal Testing of Micro-Cantilevers Immersed in Liquid

Design of a Setup for Modal Testing of Micro-Cantilevers Immersed in Liquid

van den Brink, Bram (TU Delft Mechanical, Maritime and Materials Engineering)

Alijani, F. (mentor)
Ghatkesar, M.K. (mentor)
Steeneken, P.G. (graduation committee)
Goosen, J.F.L. (graduation committee)

Delft University of Technology

Mechanical Engineering | Micro and Nano Engineering

2017-12-04

To facilitate research on the dynamics of micro-cantilevers immersed in liquid, a modal test setup was designed. Modal testing is a powerful form of dynamic testing whereby the system's natural frequencies, modal masses, modal damping ratios, mode shapes, and weight of each of these modes at a certain frequency are determined. Micro-cantilever resonators are often used for sensing applications, where information is extrapolated from the change in dynamical behavior. Such systems are used in liquid environments to characterize the fluid density and viscosity, to measure the mass and stiffness of particles suspended in this liquid, and to image biological samples using atomic force microscopy. The designed setup employs piezoelectric base actuation to excite the cantilevers, of which the response is measured in vacuum, air, and water. A clean and spurious free response is achieved in a bandwidth ranging from 20 kHz to 500 kHz in vacuum and air, and a bandwidth ranging from 50 kHz to 500 kHz in water.

Modal Testing
Modal Analysis
Microsystems
Micro-cantilevers
Liquid
Vacuum
Dynamics
Vibration Analysis
AFM
Atomic force Microscope

http://resolver.tudelft.nl/uuid:33d4d7f3-779b-4482-8fb5-fdc1fdd3cfb4

2018-07-01

Student theses

master thesis

© 2017 Bram van den Brink