Print Email Facebook Twitter Electrostatic instability of micro-plates subjected to differential pressure Title Electrostatic instability of micro-plates subjected to differential pressure: A semi-analytical approach Author Sajadi, B. (TU Delft Computational Design and Mechanics; TU Delft Dynamics of Micro and Nano Systems) Goosen, J.F.L. (TU Delft Computational Design and Mechanics) van Keulen, A. (TU Delft Computational Design and Mechanics) Date 2018 Abstract Electrostatic instability is one of the main features of many electrostatic MEMS and NEMS devices. In this paper, we investigate how the electrostatic instability of a plate-like electrode can be affected by a differential pressure. The results of this study indicate that the presence of differential pressure can have a significant influence on the equilibrium path, the number and location of unstable points, and the post-instability behavior. As a result, while the system is loaded and unloaded electrically, the electrostatic instability might lead to a snapping behavior. The noticed snapping behavior of a flat plate makes it very appealing for sensing and actuating applications. This study is based on both a semi-analytical framework and finite element simulations. The proposed analytical solution is shown to be accurate enough to be used as an effective tool for design. Subject Bi-stabilityElectrostatic instabilityMicro-plateNonlocal elasticityPull-inSnap-through To reference this document use: http://resolver.tudelft.nl/uuid:39a659ae-0d24-4f84-a1c2-1ca412496bd1 DOI https://doi.org/10.1016/j.ijmecsci.2018.02.007 ISSN 0020-7403 Source International Journal of Mechanical Sciences, 138-139, 210-218 Part of collection Institutional Repository Document type journal article Rights © 2018 B. Sajadi, J.F.L. Goosen, A. van Keulen Files PDF 1_s2.0_S0020740317315746_main.pdf 2.36 MB Close viewer /islandora/object/uuid:39a659ae-0d24-4f84-a1c2-1ca412496bd1/datastream/OBJ/view