Print Email Facebook Twitter Silicon MEMS Micro-Evaporator Title Silicon MEMS Micro-Evaporator Author Hao, J. Contributor Mihailovi?, M. (mentor) Rops, C.M. (mentor) Creemer, J.F. (mentor) Sarro, P.M. (mentor) Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics & Computer Engineering Date 2009-08-27 Subject SiliconMEMSMicro-Evaporator To reference this document use: http://resolver.tudelft.nl/uuid:3a53a0ff-4279-4492-8eee-5a47da9aad40 Part of collection Student theses Document type master thesis Rights (c) 2009 Hao, J. Files PDF Silicon_MEMS_Micro-Evaporator.pdf 2.13 MB Close viewer /islandora/object/uuid:3a53a0ff-4279-4492-8eee-5a47da9aad40/datastream/OBJ/view