Silicon MEMS Micro-Evaporator

Title

Silicon MEMS Micro-Evaporator

Author

Hao, J.

Contributor

Mihailovi?, M. (mentor)
Rops, C.M. (mentor)
Creemer, J.F. (mentor)
Sarro, P.M. (mentor)

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics & Computer Engineering

Date

2009-08-27

Subject

Silicon
MEMS
Micro-Evaporator

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Part of collection

Student theses

Document type

master thesis

Rights

(c) 2009 Hao, J.