Integrated micro vacuum tubes in siliconThe Return of the "Radio Valve"

Title

Integrated micro vacuum tubes in silicon
The Return of the "Radio Valve"

Author

Foerster, J.A.

Contributor

Middelhoek, S. (promotor)
Wolffenbuttel, R.F. (promotor)

Faculty

Electrical Engineering, Mathematics and Computer Science

Date

1996-1-19

Subject

vacuum tubes
triode
silicon micromachining

To reference this document use:

http://resolver.tudelft.nl/uuid:5861602c-6e9e-4054-8b37-4e8a4efdd559

ISBN

90-407-1389-8

Part of collection

Institutional Repository

Document type

doctoral thesis

Rights

(c) 1996 J.A. Foerster