Novel Nanometer Precision Planar Positioning Stage using Pre-sliding Friction

Title

Novel Nanometer Precision Planar Positioning Stage using Pre-sliding Friction

Author

Ouwehand, P.J.P.

Contributor

Spronck, J.W. (mentor)

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Date

2015-04-23

Subject

Nanometer Precision
Planar Positioning Stage
Pre-sliding Friction

To reference this document use:

http://resolver.tudelft.nl/uuid:6ba67749-2842-409c-9a1a-4449e5ede0f8

Embargo date

2020-04-23

Part of collection

Student theses

Document type

master thesis

Rights

(c) 2015 Ouwehand, P.J.P.