Vertical vibration isolation using permanent magnets

Vertical vibration isolation using permanent magnets

Berkhof, R.

Spronck, J.W. (mentor)

Mechanical, Maritime and Materials Engineering

Precision and Microsystems Engineering

2015-06-17

Ground vibrations result in disturbance forces in mechanical systems and cause position errors. High resolution imaging systems or chip fabrication machines require a high position accuracy, creating the need for vibration isolation systems. This thesis is focused on the development of a new kind of vibration isolation system that carries its load by means of a passive magnetic low-stiffness spring called the “magnetic gravity compensator”. It was found that a configuration of three square 20x20x5 mm magnets can be used to create a gravity compensator with a low stiffness range approximately equal to 1/2 of the magnets dimensions. The load bearing capacity of this gravity compensator was measured at 26 N, while its stiffness was lower than ±200 N/m over a range of 10 mm. A passive magnetic vertical vibration isolation system using this gravity compensator has been designed, and a 0.8 Hz vertical resonance frequency has been measured.

magnetism
vibration
magnet

http://resolver.tudelft.nl/uuid:726c4ce9-e06e-4c5e-a989-bf130bad1c5e

2020-06-17

Student theses

master thesis

(c) 2015 Berkhof, R.