Print Email Facebook Twitter Use of multi-wall carbon nanotubes as an absorber in a thermal detector Title Use of multi-wall carbon nanotubes as an absorber in a thermal detector Author Wu, H. Vollebregt, S. Emadi, A. De Graaf, G. Ishihara, R. Wolffenbuttel, R.F. Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics Date 2011-09-04 Abstract A thermopile based detector array has advantages when used for an infrared (IR) micro-spectrometer, as compared to an array of photon detector, such as flat spectral response and uncooled operation. A thermal detector requires a good absorber to achieve a high absorption coefficient in the spectral range of interest. Several solutions are available and the advantages and disadvantages are discussed. Multi-wall carbon nanotubes (CNTs) can be used as absorber with high absorption efficiency in IR band. Other advantages are high thermal conductivity and damage resistance which make them promising candidates as coatings for thermal detectors. This paper reports on nanotubes realized on a silicon substrate with titanium nitride thin film layer. Optical characterization is done using a commercially available spectrometer. Subject CNTIR absorbermicrospectrometer To reference this document use: http://resolver.tudelft.nl/uuid:7393a385-e96d-4ab5-bdbf-4e0ccbf32318 DOI https://doi.org/10.1016/j.proeng.2011.12.130 Publisher Elsevier ISSN 1877-7058 Source Procedia Engineering, 25, 2011 Part of collection Institutional Repository Document type journal article Rights © 2011 Elsevier Files PDF Wu_2011.pdf 689.24 KB Close viewer /islandora/object/uuid:7393a385-e96d-4ab5-bdbf-4e0ccbf32318/datastream/OBJ/view