Print Email Facebook Twitter Phase lag deduced information in photo-thermal actuation for nano-mechanical systems characterization Title Phase lag deduced information in photo-thermal actuation for nano-mechanical systems characterization Author Bijster, R. De Vreugd, J. Sadeghian Marnani, H. Faculty Mechanical, Maritime and Materials Engineering Department Precision and Microsystems Engineering Date 2014-08-18 Abstract In photo-thermal actuation, heat is added locally to a micro-cantilever by means of a laser. A fraction of the irradiation is absorbed, yielding thermal stresses and deformations in the structure. Harmonic modulation of the laser power causes the cantilever to oscillate. Moreover, a phase lag is introduced which is very sensitive to the spot location and the cantilever properties. This phase lag is theoretically predicted and experimentally verified. Combined with thermo-mechanical properties of the cantilever and its geometry, the location of the laser spot, the thermal diffusivity, and the layer thicknesses of the cantilever can be extracted. To reference this document use: http://resolver.tudelft.nl/uuid:74785c13-7391-4c36-834f-54fe7d771df9 Publisher American Institute of Physics ISSN 0003-6951 Source https://doi.org/10.1063/1.4893461 Source Applied Physics Letters, 105 (7), 2014 Part of collection Institutional Repository Document type journal article Rights (c) 2014 American Institute of Physics Files PDF 318091.pdf 622 KB Close viewer /islandora/object/uuid:74785c13-7391-4c36-834f-54fe7d771df9/datastream/OBJ/view