Print Email Facebook Twitter Surface Micromachined Capacitive Tactile Image Sensor Title Surface Micromachined Capacitive Tactile Image Sensor Author Wolffenbuttel, M.R. Contributor Middelhoek, S. (promotor) Regtien, P.P.L. (promotor) Faculty Electrical Engineering, Mathematics and Computer Science Date 1994-04-25 Subject tactile sensorsilicon sensormicromachininginterface electronics To reference this document use: http://resolver.tudelft.nl/uuid:794940cd-9548-41bc-b6cd-7833caabdb13 Publisher Delft University Press ISBN 90-6275-967-X Part of collection Institutional Repository Document type doctoral thesis Rights (c) 1994 M.R. Wolffenbuttel Files PDF emc_wolffenbuttel_19940425.PDF 5.73 MB Close viewer /islandora/object/uuid:794940cd-9548-41bc-b6cd-7833caabdb13/datastream/OBJ/view