Print Email Facebook Twitter Chemistry for electron-induced nanofabrication Title Chemistry for electron-induced nanofabrication Author Swiderek, Petra (University of Bremen) Marbach, Hubertus (Friedrich-Alexander-Universität Erlangen-Nürnberg) Hagen, C.W. (TU Delft ImPhys/Charged Particle Optics) Date 2018 Subject Electron-induced chemistry, FEBIDFEBIPNanofabricationNanolithography To reference this document use: http://resolver.tudelft.nl/uuid:84518f39-b301-4d77-8eb7-62d9f1ef8678 DOI https://doi.org/10.3762/bjnano.9.124 ISSN 2190-4286 Source Beilstein Journal of Nanotechnology (online), 9 (1), 1317-1320 Part of collection Institutional Repository Document type contribution to periodical Rights © 2018 Petra Swiderek, Hubertus Marbach, C.W. Hagen Files PDF 2190_4286_9_124.pdf 234.37 KB Close viewer /islandora/object/uuid:84518f39-b301-4d77-8eb7-62d9f1ef8678/datastream/OBJ/view