Resistive and CTAT Temperature Sensors in a Silicon Carbide CMOS Technology

Resistive and CTAT Temperature Sensors in a Silicon Carbide CMOS Technology

Romijn, J. (TU Delft Electronic Components, Technology and Materials)
Middelburg, L.M. (TU Delft Electronic Components, Technology and Materials)
Vollebregt, S. (TU Delft Electronic Components, Technology and Materials)
el Mansouri, B. (TU Delft Electronic Components, Technology and Materials)
van Zeijl, H.W. (TU Delft Electronic Components, Technology and Materials)
May, Alexander (Fraunhofer Institute for Integrated Systems and Devices Technology IISB)
Erlbacher, Tobias (Fraunhofer Institute for Integrated Systems and Devices Technology IISB)
Zhang, Kouchi (TU Delft Electronic Components, Technology and Materials)
Sarro, Pasqualina M (TU Delft Electronic Components, Technology and Materials)

2021

Accurately sensing the temperature in silicon carbide (power) devices is of great importance to their reliable operation. Here, temperature sensors by resistive and CMOS structures are fabricated and characterized in an open silicon carbide CMOS technology. Over a range of 25-200°C, doped design layers have negative temperature coefficients of resistance, with a maximum change of 79%. Secondly, CMOS devices are used to implement a CTAT, which achieves a maximum sensitivity of 7.5mV/K in a temperature range of 25-165°C. The integration of readout electronics and sensors that are capable of operation in higher temperature than silicon, opens application in harsher environments.

4H-SiC
SiC CMOS
silicon carbide
temperature sensor
wide bandgap semiconductors

http://resolver.tudelft.nl/uuid:941f20c2-7a0d-4aa6-b12b-57788d8ec7d3

https://doi.org/10.1109/SENSORS47087.2021.9639845

IEEE, Piscataway

2022-06-17

978-1-7281-9502-5

2021 IEEE Sensors: Proceedings

2021 IEEE Sensors, 2021-10-31 → 2021-11-03, Online at Sydney, Australia

Proceedings of IEEE Sensors, 1930-0395, 2021-October

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Institutional Repository

conference paper

© 2021 J. Romijn, L.M. Middelburg, S. Vollebregt, B. el Mansouri, H.W. van Zeijl, Alexander May, Tobias Erlbacher, Kouchi Zhang, Pasqualina M Sarro