Mechanics of Ultra-sensitive Nanoelectromechanical Silicon Cantilevers: A Combined Experimental-Theoretical Approach

Title

Mechanics of Ultra-sensitive Nanoelectromechanical Silicon Cantilevers: A Combined Experimental-Theoretical Approach

Author

Sadeghian Marnani, H.

Contributor

Van Keulen, A. (promotor)

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Date

2010-12-15

To reference this document use:

http://resolver.tudelft.nl/uuid:9607fae2-c931-4007-a233-10d5c85ad254

ISBN

978-94-91104-05-3

Part of collection

Institutional Repository

Document type

doctoral thesis

Rights

(c) 2010 Sadeghian Marnani, H.