The design of a distributed sensing system for contactless substrate transport

The design of a distributed sensing system for contactless substrate transport

Voorrips, Yvonne (TU Delft Mechanical, Maritime and Materials Engineering; TU Delft Precision and Microsystems Engineering)

van Ostayen, R.A.J. (mentor)

Delft University of Technology

Mechanical Engineering | Mechatronic System Design (MSD)

2017-08-22

In the PHD researches of Jasper Wesselingh and Phuc Vuong, an active air film positioning system for thin substrates was developed. To apply this concept in an industrial environment, this research has to be extended to include both a positioning and a transportation system. An important part for up scaling the system is having an accurate feedback of the position of the substrate. The sensing should be one sided: All components of the sensing system will be located at the bottom side of the substrate, to leave the top side free for any process that is required during transportation and/or fabrication of the substrate. A distributed sensing system that is based on the Linear Sensor Array has been designed and tested. With this measuring principle, a low cost sensing system has been developed, that can measure the in plane movement and rotation of a substrate with high accuracy.

Lineair sensor array
LSA

http://resolver.tudelft.nl/uuid:97c923e7-09d3-439b-87f2-e88d786d71b5

Student theses

master thesis

© 2017 Yvonne Voorrips