Print Email Facebook Twitter Evaluating the Influence of PMUT Mechanical Support Properties on Power Conversion Efficiency in Ultrasonically Powered Implants Title Evaluating the Influence of PMUT Mechanical Support Properties on Power Conversion Efficiency in Ultrasonically Powered Implants Author Savoia, Alessandro S. (University of Roma Tre) Giustiniano, Domenico (STMicroelectronics) Prelini, Carlo (STMicroelectronics) Saccher, M. (TU Delft Electronic Components, Technology and Materials) Rashidi, A. (TU Delft Bio-Electronics) Leotti, Alberto (STMicroelectronics) Giagka, Vasiliki (TU Delft Bio-Electronics; Fraunhofer Institute for Reliability and Microintegration IZM) Ferrera, Marco (STMicroelectronics) Date 2023 Abstract Micromachined Ultrasonic Transducers (MUTs) are being explored as power converters in wirelessly powered biomedical implants. This paper investigates the role of mechanical support properties in piezoelectric MUTs (PMUTs) on their power conversion efficiency. For this purpose, a finite element model (FEM) of a PMUT array was developed and integrated with an equivalent circuit model (ECM). The study considered different mechanical support scenarios, from rigidly clamped to completely free. These were numerically analyzed and validated by impedance measurements and acoustic power transfer experiments on PMUT prototypes. The results show that reducing the mass of the mechanical support increases the Q factor, leading to a significant improvement in power conversion efficiency, with an efficiency increase factor of 5.6x from the clamped to the free case. This approach can potentially enhance overall power conversion efficiency, reduce the need for matching networks, and enable miniaturization in ultrasonically powered implants. Subject PMUTUltrasonic MEMSPZTUltrasonic PoweringBiomedical ImplantsPower Transfer To reference this document use: http://resolver.tudelft.nl/uuid:9becec09-6558-4bc3-b514-68e6e957aab1 DOI https://doi.org/10.1109/IUS51837.2023.10306762 Publisher IEEE, Piscataway Embargo date 2024-05-07 ISBN 979-8-3503-4646-6 Source Proceedings of the 2023 IEEE International Ultrasonics Symposium (IUS) Event 2023 IEEE International Ultrasonics Symposium (IUS), 2023-09-03 → 2023-09-08, Montreal, Canada Bibliographical note Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. Part of collection Institutional Repository Document type conference paper Rights © 2023 Alessandro S. Savoia, Domenico Giustiniano, Carlo Prelini, M. Saccher, A. Rashidi, Alberto Leotti, Vasiliki Giagka, Marco Ferrera Files PDF Evaluating_the_Influence_ ... plants.pdf 2.05 MB Close viewer /islandora/object/uuid:9becec09-6558-4bc3-b514-68e6e957aab1/datastream/OBJ/view