Print Email Facebook Twitter Thermo-Optic Characterization of Silicon Nitride Resonators for Cryogenic Photonic Circuits Title Thermo-Optic Characterization of Silicon Nitride Resonators for Cryogenic Photonic Circuits Author Elshaari, A.W.A. (TU Delft QN/Kavli Nanolab Delft; KTH Royal Institute of Technology; Kavli institute of nanoscience Delft) Esmaeil Zadeh, I.Z. (TU Delft QN/Kavli Nanolab Delft; Kavli institute of nanoscience Delft) Jöns, K.D. (TU Delft QN/Kavli Nanolab Delft; KTH Royal Institute of Technology; Kavli institute of nanoscience Delft) Zwiller, Val (KTH Royal Institute of Technology) Date 2016-06-01 Abstract In this paper, we characterize the Thermo-optic properties of silicon nitride ring resonators between 18 and 300 K. The Thermo-optic coefficients of the silicon nitride core and the oxide cladding are measured by studying the temperature dependence of the resonance wavelengths. The resonant modes show low temperature dependence at cryogenic temperatures and higher dependence as the temperature increases. We find the Thermo-optic coefficients of PECVD silicon nitride and silicon oxide to be 2.51 ± 0.08 E- 5 K-1 and 0.96 ± 0.09 E-5 K-1 at room temperature while decreasing by an order of magnitude when cooling to 18 K. To show the effect of variations in the thermo-optic coefficients on device performance, we study the tuning of a fully integrated electrically tunable filter as a function of voltage for different temperatures. The presented results provide new practical guidelines in designing photonic circuits for studying low-temperature optical phenomena. Subject Integrated opticsOptical propertiesRing resonator To reference this document use: http://resolver.tudelft.nl/uuid:a418999b-3f79-4a00-a05a-7db292356fba DOI https://doi.org/10.1109/JPHOT.2016.2561622 ISSN 1943-0655 Source IEEE Photonics Journal, 8 (3) Part of collection Institutional Repository Document type journal article Rights © 2016 A.W.A. Elshaari, I.Z. Esmaeil Zadeh, K.D. Jöns, Val Zwiller Files PDF 07463458.pdf 1.06 MB Close viewer /islandora/object/uuid:a418999b-3f79-4a00-a05a-7db292356fba/datastream/OBJ/view