Feasibility Study and Design of AFM Production Wafer Calibration Method using Electrostatic Pull-in Instability

Title

Feasibility Study and Design of AFM Production Wafer Calibration Method using Electrostatic Pull-in Instability

Author

Molenaar, E.P.

Contributor

Staufer, U. (mentor)

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Date

2013-04-08

Subject

MEMS
AFM
Probe
Electrostatic
Pull-in
Cantilever

To reference this document use:

http://resolver.tudelft.nl/uuid:a64e6ff5-eb0c-4f30-987e-356c57123fe7

Embargo date

2015-04-08

Part of collection

Student theses

Document type

master thesis

Rights

(c) 2013 Molenaar, E.P.