Electromagnetic force pulse actuator for positioning at nanometer level using stick-slip friction

Title

Electromagnetic force pulse actuator for positioning at nanometer level using stick-slip friction

Author

Van Beek, M.A.

Contributor

Spronck, J.W. (mentor)

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Programme

Mechatronic System Design

Date

2015-11-19

Subject

nanometer precision
stick-slip friction
electromagnetic actuator
force pulse
voice coil motor

To reference this document use:

http://resolver.tudelft.nl/uuid:a917f552-de9f-40f3-b027-bbca999cfa13

Embargo date

2020-11-19

Part of collection

Student theses

Document type

master thesis

Rights

(c) 2015 Van Beek, M.A.