Investigating Laser-Induced Phase Engineering in MoS₂ Transistors

Investigating Laser-Induced Phase Engineering in MoS₂ Transistors

Papadopoulos, N. (TU Delft QN/Steele Lab; Kavli institute of nanoscience Delft)
Island, J.O. (TU Delft QN/van der Zant Lab; Kavli institute of nanoscience Delft)
van der Zant, H.S.J. (TU Delft QN/van der Zant Lab; Kavli institute of nanoscience Delft)
Steele, G.A. (TU Delft QN/Steele Lab; Kavli institute of nanoscience Delft)

2018

Phase engineering of MoS₂ transistors has recently been demonstrated and has led to record low contact resistances. The phase patterning of MoS₂ flakes with laser radiation has also been realized via spectroscopic methods, which invites the potential of controlling the metallic and semiconducting phases of MoS₂ transistors by simple light exposure. Nevertheless, the fabrication and demonstration of laser-patterned MoS₂ devices starting from the metallic polymorph have not been demonstrated yet. Here, we study the effects of laser radiation on 1T/1T′$-MoS₂ transistors with the prospect of driving an in situ phase transition to the 2H-polymorph through light exposure. We find that although the Raman peaks of 2H-MoS₂ become more prominent and the ones from the 1T/1T$′ phase fade after the laser exposure, the semiconducting properties of the laser-patterned devices are not fully restored, and the laser treatment ultimately leads to the degradation of the transport channel.

Field effect transistors
Laser patterning (LP)
Laser transitions
Molybdenum
molybdenum disulfide
phase transition
Power lasers
Sulfur
transistors.

http://resolver.tudelft.nl/uuid:c1ef30fa-2cc3-460b-8aac-1af543c36038

https://doi.org/10.1109/TED.2018.2855215

2019-01-27

0018-9383

IEEE Transactions on Electron Devices, 65, 4053

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Institutional Repository

journal article

© 2018 N. Papadopoulos, J.O. Island, H.S.J. van der Zant, G.A. Steele