Integrated Digital and Analog Circuit Blocks in a Scalable Silicon Carbide CMOS Technology

Integrated Digital and Analog Circuit Blocks in a Scalable Silicon Carbide CMOS Technology

Romijn, J. (TU Delft Electronic Components, Technology and Materials)
Vollebregt, S. (TU Delft Electronic Components, Technology and Materials)
Middelburg, L.M. (TU Delft Electronic Components, Technology and Materials)
el Mansouri, B. (TU Delft Electronic Components, Technology and Materials)
van Zeijl, H.W. (TU Delft Electronic Components, Technology and Materials)
May, Alexander (Fraunhofer Institute for Integrated Systems and Devices Technology IISB)
Erlbacher, Tobias (Fraunhofer Institute for Integrated Systems and Devices Technology IISB)
Zhang, Kouchi (TU Delft Electronic Components, Technology and Materials)
Sarro, Pasqualina M (TU Delft Electronic Components, Technology and Materials)

2022

The wide bandgap of silicon carbide (SiC) has attracted a large interest over the past years in many research fields, such as power electronics, high operation temperature circuits, harsh environmental sensing, and more. To facilitate research on complex integrated SiC circuits, ensure reproducibility, and cut down cost, the availability of a low-voltage SiC technology for integrated circuits is of paramount importance. Here, we report on a scalable and open state-of-the-art SiC CMOS technology that addresses this need. An overview of technology parameters, including MOSFET threshold voltage, subthreshold slope, slope factor, and process transconductance, is reported. Conventional integrated digital and analog circuits, ranging from inverters to a 2-bit analog-to-digital converter, are reported. First yield predictions for both analog and digital circuits show great potential for increasing the amount of integrated devices in future applications.

4H-SiC
integrated SiC electronics
silicon carbide
silicon carbide CMOS
wide bandgap

http://resolver.tudelft.nl/uuid:d97970dd-cf83-47a8-8a6d-86edf007a040

https://doi.org/10.1109/TED.2021.3125279

2022-07-01

0018-9383

IEEE Transactions on Electron Devices, 69 (1), 4-10

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Institutional Repository

journal article

© 2022 J. Romijn, S. Vollebregt, L.M. Middelburg, B. el Mansouri, H.W. van Zeijl, Alexander May, Tobias Erlbacher, Kouchi Zhang, Pasqualina M Sarro