Print Email Facebook Twitter Nanostep height measurement via spatial mode projection Title Nanostep height measurement via spatial mode projection Author Hermosa, N. Rosales-Guzman, C. Pereira, S.F. Torres, J.P. Faculty Applied Sciences Department ImPhys/Imaging Physics Date 2014-01-08 Abstract We demonstrate an optical scheme for measuring the thickness of thin nanolayers with the use of light beam’s spatial modes. The novelty in our scheme is the projection of the beam reflected by the sample onto a properly tailored spatial mode. In the experiment described below, we are able to measure a step height smaller than 10 nm, i.e., one-eightieth (1/80) of the wavelength with a standard error in the picometer scale. Since our scheme enhances the signal-to-noise ratio, which effectively increases the sensitivity of detection, the extension of this technique to the detection of subnanometric layer thicknesses is feasible. Subject interferometryheight measurementsphase measurementsensorssubwavelength structuresnanostructures To reference this document use: http://resolver.tudelft.nl/uuid:dcef2bbe-a323-434d-b5cc-aa7b5b7dd6e8 DOI https://doi.org/10.1364/OL.39.000299 Publisher Optical Society of America ISSN 0146-9592 Source http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-39-2-299 Source Optics Letters, 39 (2), 2014 Part of collection Institutional Repository Document type journal article Rights © 2014 Optical Society of America Files PDF Pereira_2014.pdf 500.52 KB Close viewer /islandora/object/uuid:dcef2bbe-a323-434d-b5cc-aa7b5b7dd6e8/datastream/OBJ/view