Feasibility Study for AFM Probe Calibration using the Probe’s Electrostatic Pull-in Stability

Title

Feasibility Study for AFM Probe Calibration using the Probe’s Electrostatic Pull-in Stability

Author

Pluimers, L.M.

Contributor

Van Spengen, W.M. (mentor)

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Date

2013-02-27

Subject

AFM Probe
Calibration
Electrostatic
Pull-in
Stability

To reference this document use:

http://resolver.tudelft.nl/uuid:e19c09fd-ec28-4a54-bd5e-affd2dc428da

Embargo date

2014-12-31

Part of collection

Student theses

Document type

master thesis

Rights

(c) 2013 Pluimers, L.M.