6-DoF Stage Position Measurement Concept for Microscopy with one 2D Position Sensitive Detector (PSD)

6-DoF Stage Position Measurement Concept for Microscopy with one 2D Position Sensitive Detector (PSD)

He, X.

Spronck, J.W. (mentor)
Munnig-Schmidt, R.H. (mentor)

Mechanical, Maritime and Materials Engineering

Precision and Microsystems Engineering

2014-09-25

Background Interferometers and capacitance sensors were used to measure the motion of the 6-DoF ferrofluid planar bearing positioning stage designed by Max Cafe who was the master student graduated in 2014. The sensor costs almost 30,000 euro to achieve nanometer scale accuracy. However, in some biology applications, such as observation of normal cells, the tens of micrometer scale accuracy and repeatability is good enough. That's why investigate a cost effective concept to measure the stage motion is needed. Objectives The first aim of this project is to design a 6D measurement concept. The second aim is using a normal microscope (3D) to demonstrate the performance of this measurement concept, finding back the interested cells under the microscope. The third goal is to prove the whole system can achieve 10 film repeatability, within 1000 euro. Methods After researching the position sensitive detector, the measurement concept is developed from 2D to 6D. The measurement system consists of LEDs, a pinhole, a 2D-PSD, the Arduino Uno or Due, National Instruments data acquisition box (NI) and a laptop. A test setup was built to show the 4D measurement concept. Finally, the sensor system including the electronics was built and validated on a microscope. Results and conclusions The result shows that based on theory (algorithm) the 6D motion measurement can be achieved in the future. Two microscope setups were built in the demonstration. The setup using NI proves the system can achieve 2 µm repeatability and 10 ~ 20 µm accuracy within 1800 euro cost and the setup using Arduino Due proves the measurement system can achieve 15 µm repeatability and 10 ~ 20 µm accuracy within 900 euro cost. In addition, the graphic user interface helps the users to find back the cells effectively.

6-DoF
position measurement
position sensitive detector
microscopy

http://resolver.tudelft.nl/uuid:feabb1bf-063a-420f-a8ea-1b1b95abf31d

2017-09-18

Student theses

master thesis

(c) 2014 He, X.